Products
Chucks
SEMCO Chucks offers smart solutions for clamping and processing of thin and ultra-thin wafers.
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Discover our chucks
SEMCO Technologies has been designing and manufacturing electrostatic chucks (ESC) and heating pedestals to the wafer processing industry since 1992. SEMCO provides leading OEMs, Semiconductor Fabs, foundries and laboratories worldwide with innovative
and efficient wafer handling components as original equipment or retrofit. The company actively manages global support through SEMCO subsidiaries and service centers.
Technical caracteristic
Technical caracterisitcs
Safe and easy handling of semiconductor wafers, flat panel displays, solar cells, etc. Clamping capability of a variety of materials including dielectrics and compounds.
Size
Compatible with substrates from 50-mm to 450-mm diameter.
Process Temperature
Wide operating temperature range between -150°C (-238°F) and +650°C (+1200°F).
Coulombic based technology
For Si and III-V wafers, compatible with non conductive substrates sus as Sapphire, TSV carriers...
Electrode Type
Bi-Polar, Multi-Polar
Wafer Contact Surface
Custom Pattern dedicated to customer's applications
Products
Our Chucks
Electrostatic smart clamping solutions for thin and ultra-thin wafers.
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ESC - Our expertise
Semco Technologies offers reliable solutions for clamping and processing of standard, thin and ultra-thin wafers by using proprietary ESC capacitive technology. We also have the ability to manufacture ESC's that have embedded heaters. - Complete set of thermal modelling tools for BSG regulation, optimization of thermal transfer and temperature uniformity control - Optimized backside particle control
Certifications
Our certifications and qualifications
SEMCO Technologies continously seeks to invest in new manufacturing technologies, research and development and trainings for its teams. We aim at providing the best products and services to our customers and we are commited to meet the highest levels in terms of quanlity and technicality!
ISO 9001
Project on going - End 2023
COFREND 2
COFREND 2 qualification for leak test calculation
QMOS
Employees and equipment QMOS certified
ISO 7 Cleanroom
All our products are manufactured in ISO 7 cleanroom
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